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Murata 3D MEMS Sensors

3D MEMS sensors

Murata 3D MEMS sensors brochure

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Murata’s accelerometers, inclinometers and gyroscopes are based on the company's proprietary 3D MEMS technology, and they offer a number of excellent product features and benefits for the most demanding applications. The sensors are environmentally protected with silicone gel, resulting in excellent performance and reliability in a humid environment and at temperature cycling. In addition, the robust sensing element design with over damped frequency response enables excellent performance even in harsh and vibrating environments. 

Download the Murata 3D MEMS Sensors brochure to explore the full range, or click the Ask an Expert button to get in touch with our product specialists in your local language. 

 

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Features/Applications

Features Applications
  • Unique, proprietary technology
  • Combination of bulk and surface micro-machining process technology
  • Shaping three-dimensional structure of silicon, encapsulation, and contacts for easy mounting and assembly
  • Advanced sensor element can be made of a tiny piece of silicon, capable of measuring e.g. acceleration or angular rate in three orthagonal directions
  • Construction tools and systems for professional use 
  • Underground drilling navigation systems 
  • Heavy machines
  • Navigation and GPS tilt compensation
  • Levelling and alignment systems 
  • Smart structures and geotechnical monitoring 

Brochure

Murata 3D MEMS sensors

Find out more about Murata's 3D MEMS sensor technology based on the toolset and processes for manufacturing semiconductor devices.

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